J. Vac. Sci. Technol

Recent Papers/Articles

In situ photoluminescence system for studying surface passivation in silicon heterojunction solar cells

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Volume: 33, Issue: 2

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Surface structure and surface kinetics of InN grown by plasma-assisted atomic layer epitaxy: A HREELS study

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Volume: 33, Issue: 2

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Roll-to-roll sputtered Si-doped In2O3/Ag/Si-doped In2O3 multilayer as flexible and transparent anodes for flexible organic solar cells

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Volume: 33, Issue: 2

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Surface cleaning for enhanced adhesion to packaging surfaces: Effect of oxygen and ammonia plasma

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Volume: 33, Issue: 2

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Effect of helium pressure and flow rate on microplasma propagation along hollow-core fibers

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Volume: 33, Issue: 2

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Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes

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Volume: 33, Issue: 2

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AuCl3 chemical doping on defective graphene layer

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Volume: 33, Issue: 2

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Comparison of defects in crystalline oxide semiconductor materials by electron spin resonance

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Volume: 33, Issue: 2

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Electrical properties of ultrathin titanium dioxide films on silicon

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Volume: 33, Issue: 2

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Gallium codoping for high visible and near-infrared transmission in Al-doped ZnO thin films for industrial-scale applications

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Volume: 33, Issue: 2

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Application of electron stimulated desorption techniques to measure the isotherm and the mean residence time of hydrogen physisorbed on a metal surface

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Volume: 33, Issue: 2

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Preparation of scanning tunneling microscopy tips using pulsed alternating current etching

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Volume: 33, Issue: 2

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Properties of reactively sputtered oxygenated cadmium sulfide (CdS:O) and their impact on CdTe solar cell performance

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Volume: 33, Issue: 2

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Study on contact distortion during high aspect ratio contact SiO2 etching

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Volume: 33, Issue: 2

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Investigation of electrochemical etch differences in AlGaAs heterostructures using Cl2 ion beam assisted etching

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Volume: 33, Issue: 2

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Optical emission spectroscopic studies and comparisons of CH3F/CO2 and CH3F/O2 inductively coupled plasmas

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Volume: 33, Issue: 2

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Comparison of surface vacuum ultraviolet emissions with resonance level number densities. II. Rare-gas plasmas and Ar-molecular gas mixtures

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Volume: 33, Issue: 2

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Formation of PtSi Schottky barrier MOSFETs using plasma etching

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Volume: 33, Issue: 2

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First-principles study of nitric oxide oxidation on Pt(111) versus Pt overlayer on 3d transition metals

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Volume: 33, Issue: 2

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Residual stress modeling of density modulated silicon thin films using finite element analysis

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Volume: 33, Issue: 2

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